Evidence of a correlation between process yields and reliability data for a rad-hard SOI technology

Publisher Website

19 November 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/icmts.1995.513976

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Test chip based approach to automated diagnosis of CMOS yield problems
IEEE Transactions on Semiconductor Manufacturing, 1990