Behavior and application of silicon diaphragms with a boss and corrugations
- 2 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Residual stress and mechanical properties of boron-doped p+-silicon filmsSensors and Actuators A: Physical, 1990
- Plastic deformation of higly doped SiliconSensors and Actuators A: Physical, 1990
- The fabrication and use of micromachined corrugated silicon diaphragmsSensors and Actuators A: Physical, 1990
- Silicon as a mechanical materialProceedings of the IEEE, 1982