An XPS study of NbNx prepared by ion implantation and the near-surface effects induced by Ar+ bombardment
- 1 July 1991
- journal article
- Published by Elsevier in Surface Science
- Vol. 251-252, 701-705
- https://doi.org/10.1016/0039-6028(91)91082-9
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- An XPS study of the initial stages of oxidation of hafniumSurface and Interface Analysis, 1990
- An XPS study of Cs2Te photocathode materialsSurface and Interface Analysis, 1990
- Nitrogenation of various transition metals by N+2-ion implantationApplied Surface Science, 1989
- Preparation of nitride films by Ar+-ion bombardment of metals in nitrogen atmosphereJournal of Vacuum Science & Technology A, 1988
- Ion bombardment effects on the near‐surface composition during sputter profilingSurface and Interface Analysis, 1988
- Effects of thermal annealing on superconducting Nb and NbN filmsJournal of Vacuum Science & Technology A, 1988
- Surface properties of metal-nitride and metal-carbide films deposited on Nb for radio-frequency superconductivityJournal of Applied Physics, 1987
- An XPS comparative study on thermal oxide barrier formation on Nb and NbN thin filmsApplications of Surface Science, 1985
- Low energy nitrogen implantation profiles in cobalt using AESSurface and Interface Analysis, 1980
- Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solidsSurface and Interface Analysis, 1979