Comparative evaluation of drying techniques for surface micromachining
- 1 January 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 64 (1) , 17-26
- https://doi.org/10.1016/s0924-4247(98)80053-8
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Dry release for surface micromachining with HF vapor-phase etchingJournal of Microelectromechanical Systems, 1997
- Polysilicon surface-modification technique to reduce sticking of microstructuresSensors and Actuators A: Physical, 1996
- Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanismsSensors and Actuators A: Physical, 1994
- Photoresist-Assisted Release of Movable MicrostructuresJapanese Journal of Applied Physics, 1993
- Mechanical stability and adhesion of microstructures under capillary forces. II. ExperimentsJournal of Microelectromechanical Systems, 1993
- Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theoryJournal of Microelectromechanical Systems, 1993