Fabrication and gas sensing properties of α-Fe2O3 thin film prepared by plasma enhanced chemical vapor deposition (PECVD)
- 15 June 2001
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 77 (1-2) , 221-227
- https://doi.org/10.1016/s0925-4005(01)00716-x
Abstract
No abstract availableKeywords
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