Polysilicon transistors fabricated on plasma-deposited amorphous silicon

This publication has 5 references indexed in Scilit:

• High-performance thin-film transistors in low-temperature crystallized LPCVD amorphous silicon films
  IEEE Electron Device Letters, 1987
• Effects of H⁺implant dose and film deposition conditions on polycrystalline-Si MOSFET characteristics
  IEEE Electron Device Letters, 1987
• Low Temperature Polysilicon Super-Thin-Film Transistor (LSFT)
  Japanese Journal of Applied Physics, 1986
• Characteristics and three-dimensional integration of MOSFET's in small-grain LPCVD polycrystalline Silicon
  IEEE Transactions on Electron Devices, 1985
• Hydrogen passivation of PolySilicon MOSFET's from a plasma Nitride source
  IEEE Electron Device Letters, 1984