Superconducting YBa2Cu3O7−δ thin films on Si (100) substrates with CoSi2 buffer layers by an in situ pulsed laser evaporation method
- 30 September 1991
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (14) , 1785-1787
- https://doi.org/10.1063/1.106200
Abstract
We have prepared high‐quality c‐axis oriented superconducting YBa2Cu3O7−δ thin films on Si (100) substrates with CoSi2 buffer layers by in situ pulsed laser ablation processing. The films were characterized by x‐ray diffraction, four‐point ac electrical resistivity, scanning electron microscopy (SEM), and transmission electron microscopy (TEM) techniques. YBa2Cu3O7−δ films were found to be textured with c axis perpendicular to the substrate. A plot of normalized resistance against temperature exhibited a metallic behavior followed by an onset superconducting transition at 91 K with zero resistance temperature (Tc0) of 83 K. Cross‐sectioned TEM results showed quite smooth interface between CoSi2 and Si with little interdiffusion; however, a reacted zone was observed between CoSi2 and YBa2Cu3O7−δ layers.Keywords
This publication has 17 references indexed in Scilit:
- Single-chamber, i n s i t u processing of superconducting YBa2Cu3O7−δ thin films on stainless steel with yttria-stabilized zirconia buffer layerJournal of Applied Physics, 1991
- Synthesis of superconducting YBa2Cu3O7−δ thin films on nickel-based superalloy using in situ pulsed laser depositionApplied Physics Letters, 1990
- In situ single chamber laser processing of YBa2Cu3O7−δ superconducting thin films on Si (100) with yttria-stabilized zirconia buffer layersApplied Physics Letters, 1990
- High critical currents in strained epitaxial YBa2Cu3O7−δ on SiApplied Physics Letters, 1990
- I n s i t u processing of textured superconducting thin film of Bi(-Pb)-Ca-Sr-Cu-O by excimer laser ablationApplied Physics Letters, 1990
- I n s i t u processing of epitaxial Y-Ba-Cu-O high T c superconducting films on (100) SrTiO3 and (100) YS-ZrO2 substrates at 500–650 °CApplied Physics Letters, 1989
- As-deposited Y-Ba-Cu-O superconducting films on silicon at 400 °CApplied Physics Letters, 1989
- Investigation of Potential Diffusion Barriers Between YBa2Cu3O7-x and SiliconMRS Proceedings, 1989
- Epitaxial Y-Ba-Cu-O films on Si with intermediate layer by rf magnetron sputteringApplied Physics Letters, 1988
- Formation of thin superconducting films by the laser processing methodApplied Physics Letters, 1987