AES study of electron‐beam‐induced interactions between oxygen and the Ge(111) surface
- 1 September 1976
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 47 (9) , 3868-3872
- https://doi.org/10.1063/1.323249
Abstract
For a Ge(111) surface irradiated by an electron beam of 1.5‐keV energy and current density of 2 μA mm−2, it was found that beam‐assisted oxygen adsorption at pressures −9 Torr always resulted in carbon‐contaminated overlayers and was probably due to dissociation of physisorbed CO. The sticking coefficient s of CO was 0.08. At oxygen pressures ≳10−6 Torr, carbon‐free coverages could be formed, even without irradiation. s for oxygen was 6×10−4 for beam‐assisted and 1.5×10−4 for nonassisted adsorption. Electron impact desorption followed a first‐order rate equation and the desorption cross section for oxygen was 6×10−20 cm2.This publication has 17 references indexed in Scilit:
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