Sputtering of Silver by Hydrogen Ions
- 1 July 1958
- journal article
- research article
- Published by AIP Publishing in The Journal of Chemical Physics
- Vol. 29 (1) , 3-7
- https://doi.org/10.1063/1.1744455
Abstract
The sputtering of silver by the ions H+, H2+, and D+ has been measured by allowing a magnetically analyzed beam of ions from an RF source to strike a target containing radioactive silver. The angular distribution of the sputtered silver follows approximately a cosine law. At normal incidence and 9250 volts energy, the number of atoms sputtered per incident ion is 0.03 for H+, 0.075 for H2+, and 0.08 for D+. These values are much lower than those of previous workers, and the difference is ascribed to the absence of atoms and excited molecules from the analyzed ion beams.Keywords
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