Computer-aided decomposition of geometric contours into standardized areas
- 31 July 1977
- journal article
- Published by Elsevier in Computer-Aided Design
- Vol. 9 (3) , 199-203
- https://doi.org/10.1016/0010-4485(77)90118-x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Electron-beam lithography for microcircuit fabricationElectronics & Power, 1976
- Electron beam techniques for magnetic bubble device fabricationRadio and Electronic Engineer, 1973
- A computer-controlled electron-beam machine for microcircuit fabricationIEEE Transactions on Electron Devices, 1972
- Design and control of a high precision electron beam machineRadio and Electronic Engineer, 1967