Deposition of TiN thin films on Si(100) by HCD ion plating
- 1 June 2001
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 140 (3) , 206-214
- https://doi.org/10.1016/s0257-8972(01)01120-3
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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