Manufacture of three-dimensional microdevices using synchrotron radiation (invited)

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Abstract
Future innovative microdevices and microsystems require manufacturing processes which allow a high degree of freedom in the geometrical design of the microstructure, a broad spectrum of materials, and a favorable potential for mass production at low costs. These requirements are met by the LIGA process, which uses synchrotron radiationlithography to produce extremely precise masters of three‐dimensional microstructures and subsequent electroforming and moulding processes to produce microdevices from metals, polymers, and ceramics. In this article, the basic process principles, its physical and technological limits, and some specific applications such as sensors for automotive purposes, infrared optical components, optical demultiplexers, and fiber‐chip coupling elements for optical communication systems, micronozzles and valves, electrical microconnectors, or moving microdevices are discussed.