Reduction of background due to backscattered electrons in energy‐dispersive X‐ray microanalysis

Publisher Website
Google Scholar
Abstract
When energy-dispersive X-ray microanalysis is practised in a scanning electron microscope, most of the spectral background may come from electrons entering the detector. This background can be eliminated by deflecting magnets. Alternatively, the electrons can be blocked by a plastic film but only at the cost of suppression of the low-energy end of the X-ray spectrum.