Comparative study of low energy ion beam oxidation of Si(100), Ge/Si(100) and Si 1−xGe x/Si (100)
- 20 January 1992
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 12 (1-2) , 97-101
- https://doi.org/10.1016/0921-5107(92)90266-c
Abstract
No abstract availableKeywords
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