Outgassing properties and structure of TiN films on stainless steel substrates
- 1 November 1992
- Vol. 43 (11) , 1093-1094
- https://doi.org/10.1016/0042-207x(92)90340-3
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Outgassing Properties and Microstructures of Ti-N Films.SHINKU, 1991
- Titanium nitride film as a protective coating for a vacuum deposition chamberThin Solid Films, 1979