Resonating silicon beam force sensor
- 17 May 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 17 (3-4) , 513-519
- https://doi.org/10.1016/0250-6874(89)80039-3
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Precise measurement of small forcesSensors and Actuators, 1983
- Force and weight measurementJournal of Physics E: Scientific Instruments, 1982