GaInAsP/InP Low-Mesa CPBH Surface Emitting Laser with an Optimally Deposited MgO/Si Multilayer Laser Mirror

Abstract
With an eye to high-temperature cw operation of GaInAsP/InP surface emitting lasers, we have introduced a low-mesa circular planar buried heterostructure for current confinement and a thermally conductive MgO/Si multilayer mirror for heat sinking. The deposition conditions of MgO were optimized to obtain a high mirror reflectivity of over 99%. The lasing operation of a 1.3 µm device loaded with these new materials was demonstrated with a low threshold of 3.5 mA at 77 K under the cw condition.