Growth, patterning, and weak-link fabrication of superconducting YBa2Cu3O7−x thin films

19 September 1988

journal article
research article
Published by AIP Publishing in Applied Physics Letters

Vol. 53 (12) , 1107-1109
https://doi.org/10.1063/1.100657

Abstract

We have grown thin films of the high‐temperature superconducting ceramic oxides and investigated techniques for fabricating weak‐link structures. Films of YBa₂Cu₃O_7−x grown on SrTiO₃ by a combination of dc magnetron sputtering and thermal evaporation from the three sources have been patterned into microbridges with widths down to 2 μm. We find evidence that the bridges behave as arrays of Josephson‐coupled superconducting islands. Further weak‐link behavior is induced by in situ modification of the coupling by ion milling through the bridge.

Keywords

This publication has 5 references indexed in Scilit:

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