Excitation, ionization, and reaction mechanism of a reactive cathodic arc deposition of TiN
- 1 January 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 22 (6) , 1049-1054
- https://doi.org/10.1109/27.370251
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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