Analysis of sputter deposited and evaporated tantalum oxide layers on SiO2 by SNMS, XPS, TDS and TRFA
- 1 January 1989
- journal article
- research article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 333 (4-5) , 498-501
- https://doi.org/10.1007/bf00572362
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- SNMS-analysis of insulatorsMicrochimica Acta, 1987
- The Measurement Of Absorption In Thin Films By Laser CalorimetryPublished by SPIE-Intl Soc Optical Eng ,1986
- Quantitative chemical surface, in-depth, and bulk analysis by secondary neutrals mass spectrometry (SNMS)Journal of Vacuum Science & Technology A, 1985