Submicron characterization of B-C:H thin films produced by RF plasma CVD
- 1 March 1992
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 1 (2-4) , 350-354
- https://doi.org/10.1016/0925-9635(92)90056-t
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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