The influence of ion implantation on the properties of titanium nitride layer deposited by magnetron sputtering
- 1 July 2002
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 156 (1-3) , 159-161
- https://doi.org/10.1016/s0257-8972(02)00121-4
Abstract
No abstract availableFunding Information
- Ministry of Education and Research, Romania
This publication has 4 references indexed in Scilit:
- Recent advances in surface processing with metal plasma and ion beamsSurface and Coatings Technology, 1999
- Advances in PSII techniques for surface modificationSurface and Coatings Technology, 1998
- Materials Science Aspects of Ion Beam TechnologySurface Engineering, 1991
- Plasma source ion-implantation technique for surface modification of materialsJournal of Applied Physics, 1987