Epitaxial nucleation of diamond on β-SiC via bias-enhanced microwave plasma chemical vapor deposition
- 1 March 1993
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 2 (2-4) , 142-146
- https://doi.org/10.1016/0925-9635(93)90045-4
Abstract
No abstract availableKeywords
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