Growth and characterization of thin SiN films grown on Si by electron cyclotron resonance nitrogen plasma treatment
- 1 June 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 229 (1) , 93-100
- https://doi.org/10.1016/0040-6090(93)90414-k
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
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