A high-resolution cathodoluminescence analysis system
- 1 January 1977
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 10 (1) , 43-46
- https://doi.org/10.1088/0022-3735/10/1/011
Abstract
An efficient system for the collection and analysis of cathodoluminescence (CL) excited by the electron beam of a scanning electron microscope has been developed, employing an ellipsoidal mirror with its major axis parallel to the beam direction, 45 degrees plane mirror, fibre optic light guide and grating spectrometer. The optical transfer efficiency from sample to detector is 5% at 500 nm. Spectra from areas a few micrometres across can be recorded using beam currents as low as 1 nA with a spectral resolution of 1 nm. Monochromatic CL micrographs can be displayed on the screen. Some applications of the instrument in the field of compound semiconductors are illustrated.Keywords
This publication has 6 references indexed in Scilit:
- SEM cathode-luminescent studies of plastically deformed gallium phosphidePhysica Status Solidi (a), 1975
- Dislocations in vapor phase epitaxial GaPJournal of Electronic Materials, 1974
- An efficient apparatus for studying cathodoluminescence in the scanning electron microscopeJournal of Physics E: Scientific Instruments, 1974
- Scanning electron microscopy of biological material using cathodoluminescenceMicron (1969), 1972
- Intrinsic and extrinsic edge luminescence in epitaxial GaPJournal of Physics C: Solid State Physics, 1968
- Cathodoluminescence at p-n Junctions in GaAsJournal of Applied Physics, 1965