Plasma cleaning and the removal of carbon from metal surfaces

Publisher Website

1 July 1980

journal article
Published by Elsevier in Thin Solid Films

Vol. 69 (3) , 359-368
https://doi.org/10.1016/0040-6090(80)90588-x

Abstract

No abstract available

This publication has 3 references indexed in Scilit:

Sputtering and chemical etching of carbon in a dc glow discharge
Vacuum, 1977
The chemical sputtering of graphite in an oxygen plasma
Vacuum, 1976
rf Sputtering of graphite in argon-oxygen mixtures
Vacuum, 1976