Photoluminescence study on twenty GaAs/Al0.3Ga0.7As tilted T-shaped quantum wires fabricated by glancing-angle molecular beam epitaxy
- 1 March 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 16 (2) , 575-577
- https://doi.org/10.1116/1.589866
Abstract
Twenty tilted T-shaped quantum wires (T-QWRs) on a (111)B facet were uniformly fabricated with a two-step growth of molecular beam epitaxy (MBE), which consists of a glancing-angle MBE of multi-quantum well layer with 20 GaAs wells (a well width of ) on reverse-mesa stripes on a (001) GaAs substrate and MBE overgrowth of a single-quantum well with on a (111)B facet. Full width at half maximum of a photoluminescence peak from the tilted T-QWRs was as small as 8.7 meV at 28 K, which is comparable with those (6 meV,Reference 5 10 meVReference 10) of conventional T-QWRs (6.8 nm/5.8 nm, 7 nm/7 nm) fabricated by the cleaved-edge overgrowth.
Keywords
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