Tungsten silicide barrier layers in aluminium ohmic contact systems
- 1 October 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 177 (1-2) , 9-16
- https://doi.org/10.1016/0040-6090(89)90552-x
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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