Third-order asymptotic aberration coefficients of electron lenses. III. Formulas and results for the two-tube electrostatic lens.
- 1 October 1974
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 45 (10) , 1275-1280
- https://doi.org/10.1063/1.1686478
Abstract
The third‐order asymptotic aberration coefficients of round electrostatic electron lenses are formulated, following Hawkes, in a form independent of object and aperture positions. Six quantities are sufficient to specify completely the third‐order aberration properties of electrostatic electron lenses.Equations for these six quantities are derived in the form of integrals involving derivatives of the axial potential no higher than the second. Using these equations and our previously calculated potentials and first‐order trajectories we have computed the six aberrations coefficients for the two‐tube electrostatic lens for voltage ratios from 1.1 to 10 000. The results are believed accurate to better than 0.2%.Keywords
This publication has 10 references indexed in Scilit:
- Use of matrices to represent electron lenses. Matrices for the two-tube electrostatic lensReview of Scientific Instruments, 1974
- Focal properties of the two-tube electrostatic lens for large and near-unity voltage ratiosReview of Scientific Instruments, 1974
- Focal Properties of the Two-Tube Electrostatic Lens for Large Voltage RatiosJournal of Vacuum Science and Technology, 1973
- Third-Order Aberration Coefficients of Electron Lenses. IIJournal of Vacuum Science and Technology, 1973
- Accurate Calculation of Properties of the Two-Tube Electrostatic Lens III. Aberration CoefficientsReview of Scientific Instruments, 1972
- Accurate Calculation of Properties of the Two-Tube Electrostatic Lens II. First-Order Focal Properties and P-Q CurvesReview of Scientific Instruments, 1972
- Accurate calculations of properties of the two-tube electrostatic lens. I. Improved digital methods for the precise calculation of electric fields and trajectoriesJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1972
- Electrostatic cylinder lenses. I. Two element lensesJournal of Physics E: Scientific Instruments, 1971
- Remark on Romberg quadratureCommunications of the ACM, 1965
- Die schwache elektrische Einzellinse geringster sphärischer AberrationThe European Physical Journal A, 1936