Analytical modelling of ultra-thin gas squeeze film

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Abstract
In this study, the characteristics of an ultra-thin gas squeeze film are analysed using the modified molecular gas film lubrication (MMGL) equation with coupled roughness and rarefaction effects taken into consideration. A modified squeeze number (Σ) and modified plate aspect ratio (β) are proposed to estimate molecular gas film lubrication characteristics. Using Σ, β and a simple mapping method, the linearized MMGL problem can be reduced to the continuum gas film problem and the MGL characteristics can be exactly estimated if the pressure flow factors (XP,YP) and the rarefaction coefficient (P(D)) are known. The present models are computationally compact, and thus applicable to simulation of a microelectromechanical system.
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