Static And Dynamic Flow Simulation Of A Koh-etched Micro Valve

1 January 1995

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

Vol. 2, 17-20
https://doi.org/10.1109/sensor.1995.721733

Abstract

In this paper, we present the simulation of the flow rate through a KOH-etched micro valve, which is part of an electrostatically actuated micropump. This is realized by a coupled simulation of liquid flow and structural displacement of the valve using the Finite-Element-Method. Thereby the static and dynamic behaviour of the valve can be simulated in good agreement to measurements. In combination with anallytical approaches the simulations can be integrated into system simulations. The results are of basic importance for the understanding and optimization of bi-directional silicon micropumps.

Keywords

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Published by Institute of Electrical and Electronics Engineers (IEEE) ,1995
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