Silicon diffusion in aluminium
- 28 June 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 128 (3-4) , 217-223
- https://doi.org/10.1016/0040-6090(85)90073-2
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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- Precipitation of Si from the Al Metallization of Integrated CircuitsApplied Physics Letters, 1972
- Diffusivity and Solubility of Si in the Al Metallization of Integrated CircuitsApplied Physics Letters, 1971