The deposition and characterization of β-SiC and diamond/β-SiC composite films
- 31 March 1993
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 2 (2-4) , 523-527
- https://doi.org/10.1016/0925-9635(93)90113-g
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Synthesis of diamond/β-SiC composite films by microwave plasma assisted chemical vapor depositionApplied Physics Letters, 1992
- Properties of diamond composite films grown on iron surfacesApplied Physics Letters, 1991
- The growth of hetero-epitaxial SiC films by pyrolysis of various alkyl-silicon compoundsJournal of Crystal Growth, 1974