Interaction of amorphous fluoropolymer with metal
- 25 July 1994
- journal article
- letter
- Published by AIP Publishing in Applied Physics Letters
- Vol. 65 (4) , 508-510
- https://doi.org/10.1063/1.112281
Abstract
The bonding structure of an amorphous fluoropolymer, AF 1600, with Al, Ag, Au, and Cu were examined using x‐ray photoelectron spectroscopy. 100 Å thick films of AF 1600 were deposited on various metal films. AlF3 was found at the AF 1600/Al interface. F detached from the −CF3 functional group of the AF 1600, diffused into the Al/Al2O3 matrix and formed AlF3. The diffusion depth of F is estimated to be ≳150 Å. An Al film was evaporated onto an AF 1600 film. The Al film was then mechanically peeled off and the remaining polymer surface examined. AlF3 was again found. For the spin‐on AF 1600 film on Ag, Au, and Cu, no chemical reaction between the metal and the polymer were found.Keywords
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