Low loss GaAs optical waveguides grown by the metalorganic chemical vapor deposition method

1 August 1985

journal article
conference paper
Published by AIP Publishing in Applied Physics Letters

Vol. 47 (3) , 186-187
https://doi.org/10.1063/1.96210

Abstract

In order to realize the low loss ridge optical waveguide, high‐purity GaAs and Ga_1−xAl_xAs (0<x1⁴ cm⁻³ after ten samples had been grown in the same reactor. Ridge optical waveguides fabricated showed propagation losses of 0.8 dB/cm for the GaAs homostructure waveguide and of 0.2 dB/cm for the GaAs‐GaAlAs heterostructure waveguide at 1.3‐μm wavelength.

Keywords

This publication has 3 references indexed in Scilit:

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