Moment analysis of rf parallel-plate-discharge simulations using the particle-in-cell with Monte Carlo collisions technique
- 1 November 1993
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review E
- Vol. 48 (5) , 3914-3924
- https://doi.org/10.1103/physreve.48.3914
Abstract
No abstract availableThis publication has 40 references indexed in Scilit:
- Dynamic model of the electrode sheaths in symmetrically driven rf dischargesPhysical Review A, 1990
- Two-dimensional simulations of rf glow discharges inandPhysical Review A, 1990
- Transition between different regimes of rf glow dischargesPhysical Review A, 1990
- Smooth plasma-sheath transition in a hydrodynamic modelIEEE Transactions on Plasma Science, 1990
- Macroscopic modeling of radio-frequency plasma dischargesJournal of Vacuum Science & Technology A, 1989
- Dynamics of a collisional, capacitive RF sheathIEEE Transactions on Plasma Science, 1989
- A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure rf glow dischargesJournal of Computational Physics, 1988
- Analytical solution for capacitive RF sheathIEEE Transactions on Plasma Science, 1988
- Numerical model of rf glow dischargesPhysical Review A, 1987
- A Continuum Model of DC and RF DischargesIEEE Transactions on Plasma Science, 1986