Implant profile computation with depth-dependent diffusion
- 1 January 1982
- journal article
- Published by Taylor & Francis in Radiation Effects
- Vol. 68 (1) , 1-5
- https://doi.org/10.1080/01422448208226876
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- On the influence of atomic mixing on the evolution of ion-implantation profilesPhilosophical Magazine A, 1982
- Theoretical aspects of atomic mixing by ion beamsNuclear Instruments and Methods, 1981
- Distortion of depth profiles during ion bombardment II. Mixing mechanismsNuclear Instruments and Methods, 1981
- Distortion of depth profiles during sputteringNuclear Instruments and Methods, 1980
- Depth dependence of atomic mixing by ion beamsApplied Physics Letters, 1979