Interface state density measurement in MOS structures by analysis of the thermally stimulated conductance
- 31 August 1990
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 33 (8) , 987-992
- https://doi.org/10.1016/0038-1101(90)90208-v
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Parameter estimation in MOS conductance studiesSolid-State Electronics, 1988
- Measurement of semiconductor–insulator interface states by constant-capacitance deep-level transient spectroscopyJournal of Vacuum Science and Technology, 1982
- MOS interface-state density measurements using transient capacitance spectroscopyIEEE Transactions on Electron Devices, 1980
- Determination of interface-state parameters in a MOS capacitor by DLTSSolid-State Electronics, 1980
- Determination of the energy distribution of interface traps in MIS systems using non-steady-state techniquesSolid-State Electronics, 1974
- Description of the SiO2Si interface properties by means of very low frequency MOS capacitance measurementsSurface Science, 1971
- The Si-SiO2Interface - Electrical Properties as Determined by the Metal-Insulator-Silicon Conductance TechniqueBell System Technical Journal, 1967
- FREQUENCY DEPENDENCE OF THE IMPEDANCE OF DISTRIBUTED SURFACE STATES IN MOS STRUCTURESApplied Physics Letters, 1966