Application of Laser Interferometer Systems for the Study of Ion Interaction with Solids
- 16 August 1986
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 96 (2) , K157-K161
- https://doi.org/10.1002/pssa.2210960252
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- A Laser Interferometer System to Monitor Dry Etching of Patterned SiliconJournal of the Electrochemical Society, 1983
- A strain monitor for ion implantationJournal of Physics E: Scientific Instruments, 1981
- SENSITIVE TECHNIQUE FOR STUDYING ION-IMPLANTATION DAMAGEApplied Physics Letters, 1971