Analysis of organic contaminations on Si(100) by thermal desorption spectroscopy
- 1 January 1992
- journal article
- research article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 343 (7) , 582-592
- https://doi.org/10.1007/bf00324819
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- The challenge of microelectronics for analytical chemistryAnalytical and Bioanalytical Chemistry, 1990
- Application of total reflection X-ray fluorescence in semiconductor surface analysisSpectrochimica Acta Part B: Atomic Spectroscopy, 1989
- Surface and thin film analysis in silicon technology: actual and future problems and demandsAnalytical and Bioanalytical Chemistry, 1989
- The localization and crystallographic dependence of Si suboxide species at the SiO2/Si interfaceJournal of Applied Physics, 1987
- Effect of organic contaminants on the oxidation kinetics of silicon at room temperatureApplied Physics Letters, 1986
- Oxygen chemisorption and oxide formation on Si(111) and Si(100) surfacesJournal of Vacuum Science & Technology A, 1983