High resolution acoustic microscopy in superfluid helium
- 15 May 1983
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 42 (10) , 869-871
- https://doi.org/10.1063/1.93796
Abstract
An acoustic microscope has been developed which utilizes liquid helium at temperatures less than 0.2 K as the coupling medium. At the operating frequency of 4.2 GHz, the acoustic attenuation of the helium is negligible and the acoustic wavelength is 570 Å. Micrographs of a silicon integrated circuit are presented which demonstrate the good signal-to-noise ratio of the imaging and resolution better than 500 Å.Keywords
This publication has 4 references indexed in Scilit:
- Low-Noise Cooled GASFET AmplifiersIEEE Transactions on Microwave Theory and Techniques, 1980
- Cryogenic acoustic microscopyThe Journal of the Acoustical Society of America, 1980
- Acoustic microscopy with mechanical scanning—A reviewProceedings of the IEEE, 1979
- Acoustic microscopy at optical wavelengthsApplied Physics Letters, 1978