Observation of gas absorption in evaporated amorphous silicon films using secondary ion mass spectrometry
- 1 July 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 81 (1) , 1-6
- https://doi.org/10.1016/0040-6090(81)90496-x
Abstract
No abstract availableKeywords
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