Applications of polyimide membranes to MEMS technology
- 1 January 1996
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 30 (1-4) , 547-550
- https://doi.org/10.1016/0167-9317(95)00306-1
Abstract
No abstract availableKeywords
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- Analysis Of A Micro-electric Generator For MicrosystemsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Levitation of a micromachined rotor forapplication in a rotating gyroscopeElectronics Letters, 1995
- Applications of fluorocarbon polymers in micromechanics and micromachiningSensors and Actuators A: Physical, 1994