Multiple specimen-exchange system for molecular beam epitaxy
- 1 December 1986
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 57 (12) , 3120-3122
- https://doi.org/10.1063/1.1139001
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A combined vacuum interlock and preparation assembly for MBE and surface analysisJournal of Physics E: Scientific Instruments, 1983
- Vacuum interlock system for molecular beam epitaxyReview of Scientific Instruments, 1978