On the design of a triaxial accelerometer
- 1 June 1995
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 5 (2) , 128-131
- https://doi.org/10.1088/0960-1317/5/2/018
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Capacitive sensors: When and how to use themPublished by Elsevier ,2002
- Piezoresistive accelerometer with overload protection and low cross-sensitivitySensors and Actuators A: Physical, 1993
- Integrated silicon pi-fet accelerometer with proof massSensors and Actuators, 1984
- A batch-fabricated silicon accelerometerIEEE Transactions on Electron Devices, 1979