Growth of carbon thin film by low-energy mass-selected ion beam deposition
- 1 January 1999
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 148 (1-4) , 673-677
- https://doi.org/10.1016/s0168-583x(98)00874-x
Abstract
No abstract availableKeywords
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- Ion-Beam Deposition of Thin Films of Diamondlike CarbonJournal of Applied Physics, 1971