Suppression of Excited Species from Sputter-Ion Pump by a Zeolite Trap
- 1 April 1965
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 36 (4) , 549
- https://doi.org/10.1063/1.1719621
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Sputtering Ion Source for SolidsJournal of Applied Physics, 1963