Energy Funnels --- A New Oxide Breakdown Model
- 1 January 1997
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
Stress induced leakage current (SILC) and soft breakdown (SBD) are current hot topics[l,2] in thin gate-oxide reliability. We wish to report here some new experimental observations and to propose a new model for trap assisted tunneling (TAT), SBD and Hard breakdown (HBD).Keywords
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