A study of phosphorus adsorption and desorption kinetics on silicon (111) surfaces
- 1 December 1972
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 17, 354-356
- https://doi.org/10.1016/0022-0248(72)90269-2
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Thermal desorption of gasesPublished by Elsevier ,2002
- A Quantitative Study of Auger Electron Signals of Phosphorus on Silicon Using a Quartz Crystal MicrobalanceJournal of Vacuum Science and Technology, 1972
- The (111) Surface of n-Type SiliconJournal of Vacuum Science and Technology, 1972
- Chlorine reactions on the Si (111) surfaceSurface Science, 1969
- Determination of Surface Structures using LEED and Energy Analysis of Scattered ElectronsJournal of Applied Physics, 1969
- Kinetic and Experimental Basis of Flash DesorptionJournal of Applied Physics, 1961