Optimization of hydrogen silsesquioxane for photonic applications
- 1 November 2007
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 25 (6) , 2658-2661
- https://doi.org/10.1116/1.2787832
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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